纳米技术 碳纳米管探针扫描显微术 大深宽比微纳结构测量（英文版）
Nanotechnology—Carbon nanotube probe scanning microscopy—Measurement of high aspect ratio micro-nano structures
标准状态
发布于：2026-08-28
实施于：2027-03-01
废止
基本信息
GB/T 48076-2026
即将实施
2026-08-28
2027-03-01
Chinese Academy of Sciences
State Administration for Market Regulation and Standardization Administration of China
National Technical Committee 279 on Nanotechnology of Standardization Administration of China (SAC/TC 279)
Chinese Academy of Sciences
Xi'an Jiaotong University; National Institute of Metrology, China; 探真纳米科技（衢州）有限公司
YANG Shuming, ZHANG Guofeng, JI Peirui, LI Shi, LI Wei, CUI Bo and JIA Xiansheng
标准简介
This document describes the method for measuring high aspect ratio micro-nano structures with carbon nanotube probes, including the basic principle, test conditions and required equipment, specifies the parameter ranges of carbon nanotube probes and the requirements for samples, and establishes the measurement steps. This document is applicable to the measurement of micro-nano structures of hard samples with an aspect ratio in the range of 1 to 10 and a minimum horizontal line width not less than 2 times the carbon nanotube diameter. It may be applied by reference to the measurement of other samples.
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