微机电系统（MEMS）技术 MEMS硅压阻温压复合压力传感器芯片
Micro-electromechanical systems (MEMS) technology—MEMS silicon piezoresistive pressure and temperature composite pressure sensor chip
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发布于：2026-04-30
实施于：2026-08-01
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Micro-electromechanical systems (MEMS) technology—MEMS silicon piezoresistive pressure and temperature composite pressure sensor chip