硅外延层、扩散层和离子注入层薄层电阻的测定
Test method for sheet resistance of silicon epitaxial，diffused and ion-implanted layersusing a collinear four-probe array
标准状态
发布于：1993-02-06
实施于：1993-10-01
已废止
基本信息
内容预览
Test method for sheet resistance of silicon epitaxial，diffused and ion-implanted layersusing a collinear four-probe array