微机电系统(MEMS)技术 车规级MEMS半导体气体传感器技术规范
Micro-electro mechanical systems(MEMS)technology—Technical specification of automotive MEMS semiconductor gas sensor
标准状态
发布于:2026-07-02
实施于:2027-02-01
废止
Micro-electro mechanical systems(MEMS)technology—Technical specification of automotive MEMS semiconductor gas sensor