微机电系统（MEMS）技术 柔性微机电器件循环弯曲变形后电气特性测试方法
Micro-electromechanical systems (MEMS) technology—Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices
标准状态
发布于：2026-07-02
实施于：2027-02-01
废止
Micro-electromechanical systems (MEMS) technology—Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices