微机电系统（MEMS）技术 微机电固态材料线性热膨胀系数测试方法
Micro-electromechanical system (MEMS) technology—Test method for coefficient of linear thermal expansion of micro-electromechanical solid-state material
标准状态
发布于：2026-07-02
实施于：2026-11-01
废止
Micro-electromechanical system (MEMS) technology—Test method for coefficient of linear thermal expansion of micro-electromechanical solid-state material