硅外延层堆垛层错密度测定干涉相衬显微镜法
Test method for stacking fault density of epitaxial layers of silicon by interference-contract microscopy
标准状态
发布于：1993-02-06
实施于：1993-10-01
已废止
基本信息
内容预览
Test method for stacking fault density of epitaxial layers of silicon by interference-contract microscopy